Interfacial microstructure and reaction at the spin-coated fluorinated polyimide/Al interface: surface-enhanced X-ray diffraction and TEM studies
- 1 September 1997
- journal article
- research article
- Published by Springer Nature in Applied Physics A
- Vol. 65 (3) , 287-290
- https://doi.org/10.1007/s003390050580
Abstract
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