Electron optical column for high-speed electron beam delineator: VL-R2

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Abstract
An electron optical column for a raster scan electron beam delineator with a continuously moving workstage was developed. The electron optical column consists of an electron gun using a single crystal LaB6 cathode, five magnetic lenses, and four electrostatic deflectors, which enable high-speed and hysteresisless deflection. 80-A/cm2 current density with better than 0.3 μm beam resolution and maximum beam size of 0.5×4 μm were obtained. Deflection distortion is less than 0.1 μm, and beam resolution is less than 0.3 μm without dynamic focus or astigmatism correction within 350×250 μm field size. Beam position drift is less than 0.04 μm/2H. Beam intensity instability is less than 1.0% within 36 h. The cathode lifetime was 2700 h.

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