Theoretical studies of termolecular thermal recombination of silicon atoms
- 15 April 1986
- journal article
- Published by AIP Publishing in The Journal of Chemical Physics
- Vol. 84 (8) , 4426-4428
- https://doi.org/10.1063/1.450013
Abstract
Termolecular recombination of silicon atoms in the presence of an atomic third body M is studied for thermal reactions on the ground-state 3Σ−g potential curve for Si2 dimers. The total potential surface is assumed to have pairwise form with the Si2 term being a Morse potential fitted to multireferenced double-excitation, configuration interaction (MRDCI) results. Lennard-Jones (LJ) (12,6) potentials are used for the two M–Si interactions. The termolecular rate coefficients for the temperature range 200≤T≤300 K are found to be in the range 1.69×1015≤kr(T) ≤2.56×1015 cm6/mol s if a statistical factor of unity is employed. It is argued that the most appropriate statistical factor is 1/9 for which the rate coefficients fall in the range 1.88×1014≤kr(T) ≤2.85×1014 cm6/mol s. The statistical error in the calculation precludes an accurate calculation of the small activation energy for the recombination. The limiting values are −1.24≤Ea ≤2.32 kcal/mol with a least-squares result of Ea =−0.028 kcal/mol.Keywords
This publication has 16 references indexed in Scilit:
- Effect of lattice potential upon the surface diffusion of Si on Si(100)The Journal of Chemical Physics, 1985
- Monte Carlo random walk study of recombination and desorption of hydrogen on Si(111)The Journal of Chemical Physics, 1985
- A valence-bond potential-energy surface for silylene dissociationThe Journal of Physical Chemistry, 1985
- A phenomenological approach to the calculation of the diffusion coefficient for Si on Si(111) using classical trajectoriesThe Journal of Chemical Physics, 1985
- Classical trajectory study of adsorption and surface diffusion of Si on Si(100)The Journal of Chemical Physics, 1984
- A Mathematical Model of the Coupled Fluid Mechanics and Chemical Kinetics in a Chemical Vapor Deposition ReactorJournal of the Electrochemical Society, 1984
- Potential energy curves and transition moments for the low-lying electronic states of the Si2 moleculeChemical Physics, 1982
- Cluster dynamics: Further classical trajectory studies of A+A n⇄A*n+1The Journal of Chemical Physics, 1980
- Collision induced dissociation of Ar2. Details of the collision dynamicsThe Journal of Chemical Physics, 1976
- The Role of Homogeneous Reactions in Chemical Vapor DepositionJournal of the Electrochemical Society, 1971