Analysis of amorphous layers on silicon by backscattering and channeling effect measurements
- 30 September 1970
- journal article
- Published by Elsevier in Surface Science
- Vol. 22 (2) , 263-276
- https://doi.org/10.1016/0039-6028(70)90081-6
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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