Surface roughness characterization of smooth optical films deposited by ion plating
- 30 August 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 351 (1-2) , 141-145
- https://doi.org/10.1016/s0040-6090(99)00249-7
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Interfacial roughness and related scatter in ultraviolet optical coatings: a systematic experimental approachApplied Optics, 1998
- Ion plating as an industrial manufacturing methodJournal of Vacuum Science & Technology A, 1992
- Microstructure analysis of thin films deposited by reactive evaporation and by reactive ion platingJournal of Vacuum Science & Technology A, 1989