Graphitic clusters in hydrogenated amorphous carbon induced by keV-ion irradiation
- 10 December 1990
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 57 (24) , 2546-2548
- https://doi.org/10.1063/1.103832
Abstract
Energy gap and hydrogen concentration have been measured in hydrogenated amorphous carbon (a-C:H) after bombardment with 100 keV He+ and 300 keV Ar+ ion beams, up to ion fluences 3×1016 ions/cm2. a-C:H films have been obtained by ion irradiation at low ion fluences of polystyrene layers and with a subsequent low-temperature annealing (400 °C, 10 min). Experimental values for the energy gap (2.5–0.5 eV) and hydrogen concentration (7.4×1022–1.8×1022 H atoms/cm3) have been interpreted in terms of a graphitic cluster structure with a different size (3–20 Å). We were able to determine experimentally the value of the bond integral ‖β‖ and we found it in good agreement with the calculated one for graphite.Keywords
This publication has 15 references indexed in Scilit:
- Optical-absorption edge and disorder effects in hydrogenated amorphous diamondlike carbon filmsPhysical Review B, 1989
- Resonant Raman scattering of diamondlike amorphous carbon filmsApplied Physics Letters, 1988
- Electronic and atomic structure of amorphous carbonPhysical Review B, 1987
- Molecular weight distribution and solubility changes in ion-bombarded polystyreneNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Optical constants and associated functions of metastable diamondlike amorphous carbon films in the energy range 0.5–7.3 eVJournal of Applied Physics, 1986
- Bonding in hydrogenated hard carbon studied by optical spectroscopySolid State Communications, 1983
- Structure and bonding of hydrocarbon plasma generated carbon films: An electron energy loss studySolid State Communications, 1983
- rf-plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applicationsJournal of Applied Physics, 1983
- Hard carbon coatings with low optical absorptionApplied Physics Letters, 1983
- Technique for profiling 1H with 2.5-MeV Van de Graaff acceleratorsApplied Physics Letters, 1979