Monte Carlo simulation of kilovolt electron transport in solids
Open Access
- 15 March 1990
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 67 (6) , 2955-2964
- https://doi.org/10.1063/1.345415
Abstract
A Monte Carlo procedure to simulate the penetration and energy loss of low-energy electron beams through solids is presented. Elastic collisions are described by using the method of partial waves for the screened Coulomb field of the nucleus. The atomic charge density is approximated by an analytical expression with parameters determined from the Dirac–Hartree–Fock–Slater self-consistent density obtained under Wigner–Seitz boundary conditions in order to account for solid-state effects; exchange effects are also accounted for by an energy-dependent local correction. Elastic differential cross sections are then easily computed by combining the WKB and Born approximations to evaluate the phase shifts. Inelastic collisions are treated on the basis of a generalized oscillator strength model which gives inelastic mean free paths and stopping powers in good agreement with experimental data. This scattering model is accurate in the energy range from a few hundred eV up to about 50 keV. The reliability of the simulation method is analyzed by comparing simulation results and experimental data from backscattering and transmission measurements.This publication has 36 references indexed in Scilit:
- Elastic scattering of electrons by atoms: a semiphenomenological approachJournal of Physics B: Atomic and Molecular Physics, 1987
- Analytical Dirac-Hartree-Fock-Slater screening function for atoms (Z=1–92)Physical Review A, 1987
- A Monte Carlo program to simulate the penetration and energy loss of keV electrons through matterComputer Physics Communications, 1986
- A simple model for electron scattering: inelastic collisionsJournal of Physics D: Applied Physics, 1985
- Simple generalized oscillator strength density model applied to the simulation of keV electron-energy-loss distributionsJournal of Applied Physics, 1985
- Penetration and energy loss of fast electrons through matterJournal of Physics D: Applied Physics, 1984
- A simple calculation of inelastic mean free path and stopping power for 50 eV-50 keV electrons in solidsJournal of Physics D: Applied Physics, 1983
- A simulation of the transmission of 1 keV electrons through thin films of aluminium, copper and goldJournal of Physics C: Solid State Physics, 1976
- Scattering of 2-20 keV electrons in aluminiumJournal of Physics D: Applied Physics, 1976
- The attenuation and backscattering of electron beams by thin filmsJournal of Physics D: Applied Physics, 1971