Multilayer 3-D photonics in silicon

1 January 2007

journal article
Published by Optica Publishing Group in Optics Express

Vol. 15 (20) , 12686-12691
https://doi.org/10.1364/oe.15.012686

Abstract

Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.

Keywords

MICROSTRUCTURE FABRICATION
MICRO-OPTICAL DEVICES