The application of low‐voltage scanning electron microscopy for the analysis of VLSI devices
- 1 January 1989
- Vol. 11 (4) , 199-204
- https://doi.org/10.1002/sca.4950110407
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- History of scanning electron beam testing developmentMicroelectronic Engineering, 1987
- Advanced Scanning Electron Microscopy and X-Ray MicroanalysisPublished by Springer Nature ,1986
- Reliability problems with VLSIMicroelectronics Reliability, 1984
- Fundamentals of electron beam testing of integrated circuitsScanning, 1983