Microcomputer control of thin film deposition rate
- 1 June 1983
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 16 (6) , 544-548
- https://doi.org/10.1088/0022-3735/16/6/021
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Investigation of film-thickness determination by oscillating quartz resonators with large mass loadJournal of Applied Physics, 1972