Fabrication of a high Tc superconducting bolometer

1 October 1990

proceedings article
Published by SPIE-Intl Soc Optical Eng

Vol. 1292, 137-143
https://doi.org/10.1117/12.21038

Abstract

A sensitive high-Tc superconducting bolometer has been fabricated with a YBCO thin film thermometer on a 20 microns thick sapphire substrate. Electrical measurements showed no noticeable film degradation after bolometer fabrication. Optical measurements gave a noise equivalent power of 5 x 10 to the -11th W/sq rt Hz at 10 Hz and a responsivity of 22 V/W. This performance is comparable to that of the very best pyroelectric detectors. Significant improvement appears possible.

Keywords

SUPERCONDUCTORS
MEASURING INSTRUMENTS
FILMS
HIGH TEMPERATURE SUPERCONDUCTOR
DESIGN
FABRICATION
THIN FILM
COPPER
NOISE EQUIVALENT POWER
ELECTRIC CONDUCTIVITY
BOLOMETERS
THIN FILMS
PHYSICAL PROPERTIES

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