Electrochemical Vapor Deposition of CeO2: Kinetics of Deposition of a Composite, Two‐Layer Electrolyte

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Abstract
Dense films of on dense substrates were deposited by electrochemical vapor deposition using as the source of cerium. The kinetics of film deposition were examined by considering transport processes through both the substrate and the film. A simple theoretical analysis and an experimental procedure for the determination of rate constants for both the substrate and the film are presented. The procedure permits the estimation of the kinetic parameters without making assumptions regarding the rate controlling step so far as transport processes through the substrate and the film are concerned. This technique may be equally applicable for determining the kinetics of mass transport in porous substrates. It is further shown that a linear dependence of the film thickness on time does not necessarily imply interface control. The rate constants for the substrate and pure film at 1200°C were estimated to be and , respectively. The present work thus demonstrates the feasibility of depositing a thin layer of one material over another, dense material for the fabrication of two‐layer, composite electrolytes.
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