Effect of a radiation shield on silicon CZ growth.

• 1 January 1987
• journal article
• Published by Taylor & Francis in JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
• Vol. 20  (2) , 146-151
• https://doi.org/10.1252/jcej.20.146

Abstract

Keywords

• HEAT CONDUCTION
• FINITE ELEMENT METHOD
• CRYSTAL GROWTH
• NUMERICAL SIMULATION
• SILICON