Preparation of Epitaxial SrCuOX Thin Films with an Infinite-Layer Structure

Abstract
The authors successfully prepared epitaxially-grown SrCuO X films with an infinite-layer structure by stacking atomic layers of SrO X and CuO X alternately, using a shutter-controlled sputtering method. High-resolution electron microscopy (HREM) observation indicated that the films had an infinite-layer structure and were epitaxially grown. It was considered that in order to prepare epitaxial SrCuO X films with an infinite-layer structure, the CuO X layers had to be CuO, not Cu2O or Cu.