30 keV Ion Bombardment Apparatus for Study of Interaction of Light Ions with Surfaces
- 1 July 1966
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 37 (7) , 860-866
- https://doi.org/10.1063/1.1720348
Abstract
An ultrahigh vacuum system is described which was designed to study particles emitted from surfaces under bombardment by hydrogen ions. Stress has been laid on obtaining pressures ∼10−9 Torr in the presence of the ion beam. The beam is mass analyzed and its energy is variable from 5 to 30 keV. A maximum current of 300 μA over 0.1 cm2 is obtainable at the target, so that a beam/neutral gas bombardment ratio of better than 1000/1 can be achieved. A target mounting turntable is described which allows up to six targets to be bombarded in turn. A quadrupole mass filter is incorporated in the target chamber as a residual gas analyzer and as a means of identifying gas species resulting from the bombardment of surfaces.Keywords
This publication has 9 references indexed in Scilit:
- Titanium Filaments for Sublimation PumpsJournal of Vacuum Science and Technology, 1966
- The performance of a high speed getter pump using a cooled titanium filmVacuum, 1965
- Sputtering rates under solar-wind bombardmentPlanetary and Space Science, 1963
- A 100 keV heavy ion accelerator for the study of irradiation damageJournal of Nuclear Energy. Part C, Plasma Physics, Accelerators, Thermonuclear Research, 1962
- Mercury Ion Beam Sputtering of Metals at Energies 4–15 kevJournal of Applied Physics, 1961
- Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 evJournal of Applied Physics, 1961
- Two-Directional Focusing of Charged Particles with a Sector-Shaped, Uniform Magnetic FieldReview of Scientific Instruments, 1951
- Measured Properties of Strong "Unipotential" Electron LensesProceedings of the Physical Society. Section B, 1949
- The Performance of a New Radio-Frequency Ion SourceProceedings of the Physical Society, 1948