Copper-based metallization for ULSI circuits

• 31 December 1996
• journal article
• Published by Elsevier in Microelectronic Engineering
• Vol. 34  (1) , 119-122
• https://doi.org/10.1016/s0167-9317(96)00022-6

Abstract

Keywords

• ULSI CIRCUIT
• COPPER-BASED METALLIZATION
• COPPER
• ELECTROMIGRATION
• INTEGRATED CIRCUIT