Hexagonal β‐SiC Particles

Abstract
Among small β‐SiC particles (0.2 ∼ 0.4 μm in size) produced by chemical vapor reaction, hexagonal particles having diameters around 0.2 μm are sometimes found. When observed by TEM, they have image contrasts reminiscent of “multiply twinned particles”. Analysis of diffraction patterns and image contrasts observed indicates that these particles consist of multiple twins with twin planes parallel to the basal plane. The characteristics of growth processes of such particles are discussed.