A New Micro Pneumatic Actuator for Micromechanical Systems

Publisher Website

1 January 2001

book chapter
Published by Springer Nature

p. 722-725
https://doi.org/10.1007/978-3-642-59497-7_172

Abstract

No abstract available

Keywords

This publication has 2 references indexed in Scilit:

New differential-type SMA actuator for a miniature silicon gripper
Published by SPIE-Intl Soc Optical Eng ,2001
Application and Investigation of In-Plane Compliant SU8-Structures for MEMS
Published by Springer Nature ,2001