Axial distribution of optical emission in a planar magnetron discharge
- 1 September 1988
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 6 (5) , 2960-2964
- https://doi.org/10.1116/1.575460
Abstract
We measure the axial distribution S of optical emission in a dc planar magnetron discharge for various currents I, voltages V, and magnetic fields B. We develop an integral equation model of the distribution, which is in good agreement with the measurements. At fixed I, we find that the position Δ from the cathode of the peak in emission Smax scales as the ion Child law sheath thickness Δ∝V7/8/B1/4, and that for small B’s, Smax ∝B/V1/2.Keywords
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