Cathodic Debond of Anodically Bonded Silicon to Glass Wafers

• 1 January 1999
• journal article
• Published by The Electrochemical Society in Electrochemical and Solid-State Letters
• Vol. 3  (8) , 392
• https://doi.org/10.1149/1.1391157

Abstract

Keywords

• CATHODIC DEBOND
• GLASS WAFERS
• ANODICALLY BONDED
• BONDED SILICON