Electrical properties of sputtered A1N films and interface analyses by Auger electron spectroscopy
- 1 January 1981
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 75 (2) , 167-176
- https://doi.org/10.1016/0040-6090(81)90453-3
Abstract
No abstract availableKeywords
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