Preparation of Silicon Oxycarbide Ceramic Films by Pyrolysis of Polymethyl- and Polyvinylsilsesquioxanes
- 1 January 1999
- journal article
- Published by Springer Nature in Journal of Sol-Gel Science and Technology
- Vol. 16 (3) , 227-234
- https://doi.org/10.1023/a:1008765103113
Abstract
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