In situ scanning electron microscope observation of hillock and whisker growth on Al–Ta alloy films for interconnections of thin film transistor–liquid crystal displays
- 1 September 1994
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 12 (5) , 2922-2924
- https://doi.org/10.1116/1.578966
Abstract
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