Mechanisms of atomic ion emission during sputtering
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 14 (4-6) , 403-413
- https://doi.org/10.1016/0168-583x(86)90135-7
Abstract
No abstract availableKeywords
Funding Information
- Office of Naval Research
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