Nanotribological characterization of digital micromirror devices using an atomic force microscope
- 1 August 2004
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 100 (3-4) , 391-412
- https://doi.org/10.1016/j.ultramic.2003.11.016
Abstract
No abstract availableKeywords
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