Artificial intelligence in process control of pulsed laser deposition
- 1 January 1994
- journal article
- Published by Elsevier in Annual Review in Automatic Programming
- Vol. 19, 129-134
- https://doi.org/10.1016/0066-4138(94)90054-x
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Emerging methods for the intelligent processing of materialsJournal of Materials Engineering and Performance, 1993
- Pulsed Laser Deposition History and Laser-Target InteractionsMRS Bulletin, 1992
- Pulsed Laser DepositionMRS Bulletin, 1992
- Deposition and properties of MoS2 thin films grown by pulsed laser evaporationSurface and Coatings Technology, 1988