Epitaxial Growth of Bi12SiO20 Films by Chemical Vapor Deposition

Abstract
The growth of Bi12SiO20 films on (111) Bi12SiO20 substrates has been attempted by chemical vapor deposition. With the source material combination of Bi metal and silicon alkoxide, transparent epitaxial films have been grown in the wide composition range of x=10.8–17.6, where x denotes the ratio of Bi to Si in the grown films.

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