Large volume, high density rf inductively coupled plasma
- 27 April 1987
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 50 (17) , 1130-1132
- https://doi.org/10.1063/1.98257
Abstract
Magnetized argon plasma columns with peak densities of greater than 1018 m−3, lengths of 2 m, and full width half‐maximum diameters of 0.3 m have been created at pressures of 40 mPa (3×10−4 Torr) with input powers of 1.5 kW of 7 MHz rf.Keywords
This publication has 3 references indexed in Scilit:
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- Measurements of spatial cyclotron damping in a uniform magnetic fieldPhysics Letters A, 1974
- Waves in a Plasma in a Magnetic FieldPhysical Review B, 1958