A zone plate shadow camera for 100 keV x rays and 6 MeV protons

• 1 October 1983
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 1  (4) , 1280-1284
• https://doi.org/10.1116/1.582729

Abstract

Keywords

• SPATIAL RESOLUTION
• REACTIVE ION ETCHING
• HIGH RESOLUTION
• HIGHER ORDER
• FRESNEL ZONE PLATE
• IMAGE PROCESSING
• CHARGED PARTICLES