High performance, low complexity 0.18 μm SiGe BiCMOS technology for wireless circuit applications

Abstract
High frequency performance at low current density and low wafer cost is essential for low power wireless BiCMOS technologies. We have developed a low-complexity, ASIC-compatible, 0.18 μm SiGe BiCMOS technology for wireless applications that offers 3 different breakdown voltage NPNs; with the high performance device achieving F t /F max of 60/85 GHz with a 3.0 V BV CEO . In addition, a full suite of high performance passive devices complement the state-of-the-art SiGe wireless HBTs. Author(s) Feilchenfeld, N. IBM Microeletronics Div., Essex Junction, VT, USA Lanzerotti, L. ; Sheridan, D. ; Wuthrich, R. ; Geiss, P. ; Coolbaugh, D. ; Gray, P. ; He, J. ; Demag, P. ; Greco, J. ; Larsen, T. ; Patel, V. ; Zierak, M. ; Hodge, W. ; Rascoe, J. ; Trappasso, J. ; Orner, B. ; Norris, A. ; Hershberger, D. ; Voegeli, B. ; Voldman, S. ; Rassel, R. ; Ramachandrian, V. ; Gautsch, M. ; Eshun, E. ; Hussain, R. ; Jordan, D. ; St Onge, S. ; Dunn, J.

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