Remote infrared radiation detection using piezoresistive microcantilevers
- 11 November 1996
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 69 (20) , 2986-2988
- https://doi.org/10.1063/1.117752
Abstract
A novel micromechanical infrared (IR) radiation sensor has been developed using commercially available piezoresistive microcantilevers. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress between the top layer (coating) and the substrate. The bending causes a change in the piezoresistance and is proportional to the amount of heat absorbed. The microcantilever IR sensor exhibits two distinct thermal responses: a fast one (1/2. This value can be further reduced by designing microcantilevers with better thermal isolation that can allow microcantilevers to be used as uncooled IR radiation detectors.Keywords
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