Thin-film microlens arrays with non-spherical elements

Abstract
Different types of microlens arrays consisting of extremely non-spherical elements have been produced with thin-film deposition methods. structures with pitches of and element numbers of up to have been deposited on rigid quartz and flexible polycarbonate substrates. Axial and radial beam shaping has been investigated theoretically as well as experimentally for selected geometries (Gaussian and double-parabolic profiles, pitch). Oscillating intensity distributions, in particular extended and multiple foci, have been generated by Gaussian-like and double-parabolic phase functions. The specific spatial transformation characteristics can be used for applications in the fields of laser material processing, optical sensing and measuring techniques. Fibre coupling and collimation with non-spherical microlenses have been demonstrated.

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