Characterization of as-prepared and annealed W/C multilayer thin films

• 1 January 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 10  (1) , 145-151
• https://doi.org/10.1116/1.578127

Abstract

Keywords

• MICROSTRUCTURES
• RAMAN SCATTERING
• X RAY DIFFRACTION
• MAGNETRON SPUTTERING
• CRYSTAL STRUCTURE
• THIN FILM
• HEAT TREATMENT