Investigation of the elements depth profiles in surface layers of glass modified by ion beam assisted deposition
- 1 March 1994
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 85 (1-4) , 264-267
- https://doi.org/10.1016/0168-583x(94)95824-6
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Measurement of (p, p) elastic cross sections for C, O and Si in the energy range 1.0–3.5 MeVNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
- A review of high-dose implantation and production of ion mixed structuresNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Proton elastic scattering cross sections of carbon, nitrogen and silicon for backscattering analysis in the energy range 0.7—2.5 MeVNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985