Reduction of Effective Sputtering Yield by Honeycomb Structures
- 1 January 1978
- journal article
- Published by Taylor & Francis in Journal of Nuclear Science and Technology
- Vol. 15 (7) , 471-475
- https://doi.org/10.3327/jnst.15.471
Abstract
The sputtering yield of Mo honeycomb walls was compared with the yield of fiat walls in a d.c. Ar glow discharge. Under the experimental condition where the mean energy is approximately 1 keV and t...Keywords
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