Growing carbon nanotubes by microwave plasma-enhanced chemical vapor deposition
- 23 June 1998
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 72 (26) , 3437-3439
- https://doi.org/10.1063/1.121658
Abstract
A processing route has been developed to grow bundles of carbon nanotubes on substrates from methane and hydrogen mixtures by microwave plasma-enhanced chemical vapor deposition, catalyzed by iron particles reduced from ferric nitrate. Growth takes place at about 900 °C leading to nanotubes with lengths of more than 20 μm and diameters on the nanometer scale.Keywords
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