Simple models for piston-type micromirror behavior

• 9 January 2006
• journal article
• Published by IOP Publishing in Journal of Micromechanics and Microengineering
• Vol. 16  (2) , 303-313
• https://doi.org/10.1088/0960-1317/16/2/015

Abstract

Keywords

• SIMPLE MODELS
• PISTON TYPE
• MICROMIRROR BEHAVIOR
• TYPE MICROMIRROR