Chemical effects of microwave discharges
- 1 January 1974
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Proceedings of the IEEE
- Vol. 62 (1) , 4-11
- https://doi.org/10.1109/proc.1974.9379
Abstract
An introduction to chemical phenomena associated with microwave plasmas is given. Specifically, the generation, the identification, and the reactions of microwave plasma species are discussed. Some applications of microwave plasmas are also presented.Keywords
This publication has 0 references indexed in Scilit: