An Etch-Stop Technique Using Cr2O3 Thin Film and Its Application to Silica PLC Platform Fabrication

• 1 October 2002
• journal article
• research article
• Published by Wiley in ETRI Journal
• Vol. 24  (5) , 398-400
• https://doi.org/10.4218/etrij.02.0202.0501

Abstract

Keywords

• ETCH STOP
• STOP TECHNIQUE
• SILICA
• FABRICATION
• PLATFORM
• CR2O3 THIN
• USING CR2O3