A planar air levitated electrostatic actuator system
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Vacuum-sealed silicon micromachined incandescent light sourcePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- The modeling of electrostatic forces in small electrostatic actuatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Micro-diaphragm pressure sensorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1986