Spotty Defects in Oxidized Floating-Zoned Dislocation-Free Silicon Crystals

• 1 February 1972
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 11  (2) , 197-205
• https://doi.org/10.1143/jjap.11.197

Abstract

Keywords

• HEAT TREATMENT
• DISLOCATIONS
• DISSOLVED OXYGEN
• X RAY DIFFRACTION