Stemless wine-glass-mode disk micromechanical resonators
- 8 October 2003
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
Polysilicon wine-glass mode micromechanical disk reso- nators using a stemless, non-intrusive suspension structure have been demonstrated in both vacuum and atmospheric pressure at frequencies around 73.4 MHz with Q's as high as 98,000 in vacuum, and 8,600 in atmosphere—the highest ever reported Q's at this frequency range and in these envi- ronments for any on-chip micro-scale resonator. The Q of 98,000 in vacuum for this wine-glass mode resonator is more than 10X higher than measured on radial contour mode coun- terparts, and more than 8X higher than exhibited by pub- lished free-free beams at 70 MHz.Keywords
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