Design and fabrication of thin-film heads based on a dry process (invited)

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Abstract
High performance thin‐film heads for disk drive systems have been developed based on a dry process. Heads were computer simulated and optimal design was carried out. Relationships among Ni‐Fe composition, domain structure and wiggle of the read‐write waveform were obtained. Based on these results, optimum Ni‐Fe composition range was determined. A planarization procedure for an inbedding insulator of the conductor coil was developed. Also narrow track patterning and gap depth controlling procedures were developed. Using these procedures, a two‐layered seventeen‐turn thin‐film head for a large capacity disk drive system (23 Mb/in.2) has been developed. The head exhibited excellent read‐write characteristics.