Flux measurement of a hyperthermal atomic oxygen beam
- 1 January 1993
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 11 (1) , 264-266
- https://doi.org/10.1116/1.578714
Abstract
A method has been developed and is described for measuring the flux of a beam of hyperthermal oxygen atoms using a quadrupole mass spectrometer. The accuracy of this method has been assessed by adsorbing the O atom flux on a Au surface for a specified period of time and quantifying the adsorbed amount using ion scattering spectroscopy and by estimating the oxygen-atom flux from the electron stimulated desorption parameters used to produce the oxygen-atom beam.Keywords
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