Simple flying spot scanner for electron beam lithography on a scanning electron microscope without beam blanking capability
- 1 July 1980
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 51 (7) , 992-994
- https://doi.org/10.1063/1.1136327
Abstract
A novel low‐cost flying spot scanner that allows a standard scanning electron microscope to be converted into an electron beam lithography system is described. Such a system is useful as a research tool for fabricating small arrays of submicron structures and devices.Keywords
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