Nanoscale effects in focused ion beam processing

• 1 May 2003
• journal article
• research article
• Published by Springer Nature in Applied Physics A
• Vol. 76  (7) , 1017-1023
• https://doi.org/10.1007/s00339-002-1943-1

Abstract

Keywords

• PACS: 61.80.JH
• 81.16.RF