An investigation of spin coating of electron resists
- 1 November 1979
- journal article
- Published by Wiley in Polymer Engineering & Science
- Vol. 19 (15) , 1117-1121
- https://doi.org/10.1002/pen.760191509
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Characteristics of resist films produced by spinningJournal of Applied Physics, 1978
- Rheology and Modeling of the Spin Coating ProcessIBM Journal of Research and Development, 1977
- The flow due to a rotating discMathematical Proceedings of the Cambridge Philosophical Society, 1934