Fabrication of Barium Titanate Thin Films by Potentiostatic Electrochemical Deposition.
Open Access
- 1 January 2001
- journal article
- Published by Ceramic Society of Japan in Journal of the Ceramic Society of Japan
- Vol. 109 (1275) , 915-919
- https://doi.org/10.2109/jcersj.109.1275_915
Abstract
BaTiO3 thin films were prepared on Pt/Ti/SiO2/Si substrates in a water-methyl alcohol mixed bath, nearly saturated with barium nitrate, by potentiostatic electrochemical deposition. Weights and compositions of the as-grown films were controlled by regulating electrochemical parameters such as the electrode potential, the quantity of electricity, and the concentrations of Ti (IV) peroxo complexes in the electrolysis bath. Ba/Ti ratios in the as-grown films were constant along the depth direction. No impurity in the as-grown films was detected. The as-grown films were amorphous, and Ba2+ ions in them were present mainly as barium nitrate. Polycrystalline BaTiO3 thin films were obtained by annealing above 500°C for 1h in air. The BaTiO3 thin films were crystallized at a relatively low temperature of approximately 500°C due to easy decomposition of barium nitrate to barium oxide and nitrous gas during annealing.Keywords
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