Ion beam milling as a diagnostic for optical coatings
- 1 June 1981
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 20 (11) , 1899-1901
- https://doi.org/10.1364/ao.20.001899
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Technology of ion beam sources used in sputteringJournal of Vacuum Science and Technology, 1978
- Relationship between sputter cleaning parameters and surface contaminantsJournal of Applied Physics, 1973
- Cone Formation on Metal Targets during SputteringJournal of Applied Physics, 1971