Properties of ion beam deposited Pb1−xLax(ZryTiz)1−x/4O3
- 1 May 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (3) , 1199-1201
- https://doi.org/10.1116/1.576253
Abstract
We have recently investigated ion beam sputtering and ion assisted deposition of Pb1−xLax(ZryTiz)1−x/4O3 (PLZT). Ion beam sputtered PLZT films display strong second-harmonic generation. Good quality material has been deposited on substrates of Si, Si with a buffer layer of SiO2 , and fused silica. The surface morphology of ion beam sputtered PLZT is of very high quality.Keywords
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